iCS GASSMITH Series Dry Scrubber Systems
High-performance dry gas abatement systems designed to treat hazardous semiconductor process gases using application-specific absorbent media.
Targeted Treatment for Hazardous Process Gases
The iCS Technology GASSMITH Series is designed to remove hazardous gases from semiconductor and industrial process exhaust using specialised absorbent media.
The gases react with the selected treatment material inside the scrubber, helping convert or capture targeted contaminants before the exhaust enters the facility exhaust network.
- Designed for hazardous and toxic process gases
- Dry treatment without continuous wet scrubbing
- Application-specific absorbent selection
- GS100, GS200 and GS400 system configurations
How Dry Absorbent Gas Abatement Works
Process exhaust passes through treatment media selected according to the target gas and application requirements.
Gas Entry
Process exhaust enters the GASSMITH system through the designated KF inlet connection.
Absorbent Treatment
The gas contacts specialised absorbent media selected for the relevant chemical compounds.
Gas Removal
Target gases are adsorbed or chemically reacted within the treatment media.
Treated Exhaust
The treated gas leaves through the outlet and connects to the facility exhaust arrangement.
Why Choose the GASSMITH Dry Scrubber Series?
Targeted Gas Treatment
Treatment media can be selected according to the specific process gas and required operating conditions.
No Continuous Wet Scrubbing
The dry-treatment approach avoids the need for a continuously operating wet scrubbing process.
Multiple Configurations
GS100, GS200 and GS400 options support different process-flow, installation and capacity requirements.
Semiconductor Applications
Designed for hazardous gas streams found in semiconductor and advanced manufacturing environments.
Additional gases and organic compounds may be treatable depending on the selected absorbent media. Technical confirmation is required.
iCS GASSMITH Dry Scrubber Models
Compare the GS100, GS200 and GS400 configurations.
GASSMITH GS100
A compact dry scrubber configuration for process-gas flows up to 100 slm, subject to gas type and application conditions.
- Dimensions
- 800 × 650 × 1,900 mm
- Inlet
- NW25 KF
- Outlet
- NW25 KF
- Maximum flow
- 100 slm
- Operating pressure
- ±0.05 MPa
- Power
- AC110V or AC220V, 50–60 Hz
GASSMITH GS200
A dry gas-treatment system with a larger cabinet and absorbent capacity for semiconductor process applications.
- Dimensions
- 900 × 900 × 1,800 mm
- Reported weight
- 548 kg
- Gas inlet
- DN40 KF
- Gas outlet
- DN40 KF
- Power
- 208V / 60Hz, 3-phase, 15A
- N₂ connection
- Swagelok ¼", 85–115 psi
GASSMITH GS400
A wider dry scrubber configuration designed for applications requiring a larger system footprint and treatment arrangement.
- Dimensions
- 1,650 × 900 × 1,700 mm
- Reported weight
- 548 kg
- Gas inlet
- DN40 KF
- Gas outlet
- DN40 KF
- Power
- 208V / 60Hz, 3-phase, 15A
- N₂ connection
- Swagelok ¼", 85–115 psi
Specifications are based on currently available product information. Final dimensions, media selection, gas capacity and utility requirements should be confirmed for each project.
Hardware and Facility Connections
Connection and utility requirements depend on the selected model.
GS100 Requirements
- NW25 KF process gas inlet and outlet
- Maximum process flow: 100 slm
- Operating pressure: ±0.05 MPa
- Ø100 × 100 mm exhaust-duct connection
- N₂ connection: Swagelok ¼"
- N₂ pressure: 6–8 bar or 85–115 psi
- AC110V or AC220V single-phase power
GS200 and GS400 Requirements
- DN40 KF process gas inlet and outlet
- 208V / 60Hz, three-phase, 15A power
- N₂ connection: Swagelok ¼"
- N₂ pressure: 85–115 psi
- Reserved cabinet-exhaust connection
- Butterfly valve for exhaust-flow adjustment
- Final exhaust flow determined by cabinet requirements
Dry Scrubber Applications
Semiconductor Process Tools
Point-of-use treatment for hazardous gases used in semiconductor fabrication and supporting processes.
Gas Cabinet Exhaust
Targeted dry treatment for gas-cabinet and safety-exhaust applications.
Low-Flow Toxic Streams
Application-specific absorbent treatment for selected low-flow toxic or reactive gas streams.
GASSMITH Dry Scrubber FAQs
What is a dry gas scrubber?
A dry scrubber passes process exhaust through treatment media that adsorbs or chemically reacts with targeted gas contaminants.
Which gases can GASSMITH systems treat?
The available product information lists gases including AsH₃, PH₃, BF₃, SiH₄, GeH₄, DCS, TCS, Cl₂, HCl, HF, F₂, NH₃, BCl₃, WF₆ and H₂S. Suitability must be confirmed for each application.
How do I choose between GS100, GS200 and GS400?
Selection depends on gas type, concentration, exhaust flow, required media capacity, connection size, equipment footprint and available facility utilities.
Does the absorbent media need replacement?
Yes. Dry treatment media has a finite capacity. Replacement frequency depends on gas loading, operating hours, concentration and the selected absorbent.
Can one absorbent treat every process gas?
No. Treatment media must be selected according to the target gases and operating conditions. A technical review is required before confirming the appropriate media.
Need Help Selecting a GASSMITH Model?
Share your process gases, concentrations, exhaust flow and equipment connections. Our technical team will help review your requirements.