GS100/ GS200 / GS400
Absorbent Type (Dry) Abatement
Advanced Gas Scrubbing for Semiconductor Applications
ICS GASSMITH Series Dry Scrubber System
The ICS GASSMITH Series is a high-performance dry scrubber semiconductor gas abatement system designed to remove hazardous gases such as arsine and phosphine in industrial environments.
| Dimension | W(mm) | D(mm) | H(mm) | Adsorbent Volume (L) | Sealing Tube Material | Weight (kg) |
|---|---|---|---|---|---|---|
| GS 200 | 900 | 900 | 1800 | 200(L) | S180LA | 548 |
| GS 400 | 1650 | 900 | 1700 | 200(L) | S360LA | 548 |
| GS 100 | 800 | 650 | 1900 |
Gas Abatement Performance
The GASSMITH gas abatement system delivers high efficiency in toxic gas abatement systems, achieving removal rates above 99% for semiconductor exhaust gases.
GS 100
GS 200
GS 400
Processable Gases
AsH3, PH3, BF3, SiH4, GeH4, DCS, TCS, CI2, HCI, HF, F2, NH3, TDMAT, BCI3, WF4, TEOS, SiF, NO, CO, H2S, TMGa, TMIn, TMAI, IPA, Alcohols, Ketones, Organic Solvents, etc.
Processable Gases
| GS200 / GS400 |
|---|
| Gas Inlet: DN40 KF flange |
| Gas Outlet: DN40 KF flange |
| Main Power: 208V / 60Hz (3-phase, 15A) |
| N2: Swagelok 1/4" 85-115psi |
| CDA: N/A |
| Cabinet Exhaust: Reserved opening for 100 mm × 70 mm bellows tubing. Equipped with a butterfly throttle valve to adjust and meet the required exhaust airflow of the customer’s cabinet. Required exhaust flow rate: 20 × cabinet volume. |
Hardware Requirements ICS GASSMITH Series (GS100)
Process Gas Inlet / Outlet
- Inlet Connection: NW25 KF flange
- Outlet Connection: NW25 KF flange
- Operating Pressure: ±0.05 MPa
- Maximum Flow Rate: 100 slm
Exhaust Duct Specification
- Connection Size: Ø100 × 100 mm
- Application: For bellows tubing
Utilities
- Nitrogen (N₂) Connection: Swagelok ¼"
- Required Pressure: 6–8 bar (85–115 psi)
Electrical Requirements
- Power Supply: Single-phase AC110V or AC220V
- Frequency: 50–60 Hz
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