GS100/ GS200/ GS400
Absorbent Type (Dry)
Abatement
Advanced Gas Scrubbing for Semiconductor Applications
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dimension specification
| Dimension | W(mm) | D(mm) | H(mm) | Adsorbent Volume (L) | Sealing Tube Material | Weight (kg) |
|---|---|---|---|---|---|---|
| GS 200 | 900 | 900 | 1800 | 200(L) | S180LA | 548 |
| GS 400 | 1650 | 900 | 1700 | 200(L) | S360LA | 548 |
| GS 100 | 800 | 650 | 1900 |
GS 100
GS 200
GS 400
Processable Gases
AsH3, PH3, BF3, SiH4, GeH4, DCS, TCS, CI2, HCI, HF, F2, NH3, TDMAT, BCI3, WF4, TEOS, SiF, NO, CO, H2S, TMGa, TMIn, TMAI, IPA, Alcohols, Ketones, Organic Solvents, etc.
Processable Gases
| GS200 / GS400 |
|---|
| Gas Inlet: DN40 KF flange |
| Gas Outlet: DN40 KF flange |
| Main Power: 208V / 60Hz (3-phase, 15A) |
| N2: Swagelok 1/4" 85-115psi |
| CDA: N/A |
| Cabinet Exhaust: Reserved opening for 100 mm × 70 mm bellows tubing. Equipped with a butterfly throttle valve to adjust and meet the required exhaust airflow of the customer’s cabinet. Required exhaust flow rate: 20 × cabinet volume. |
Hardware Requirements (GS100)
Process Gas Inlet / Outlet
- Inlet Connection: NW25 KF flange
- Outlet Connection: NW25 KF flange
- Operating Pressure: ±0.05 MPa
- Maximum Flow Rate: 100 slm
Exhaust Duct Specification
- Connection Size: Ø100 × 100 mm
- Application: For bellows tubing
Utilities
- Nitrogen (N₂) Connection: Swagelok ¼"
- Required Pressure: 6–8 bar (85–115 psi)
Electrical Requirements
- Power Supply: Single-phase AC110V or AC220V
- Frequency: 50–60 Hz
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