At Camda Engineering, we provide a comprehensive suite of abatement systems designed to meet the most stringent environmental regulations.
From high-energy Plasma-Wet units for difficult greenhouse gases to passive Absorbent canisters for emergency safety, our portfolio ensures your facility operates with safety, compliance, and efficiency.
Choosing the Right Abatement System for your Process
| Abatement Type | Primary Target | Mechanism | Utility Usage |
|---|---|---|---|
| Plasma-Wet | PFCs (SF6, CF4) | Plasma Dissociation | High Power / Water |
| Thermal-Wet | Flammables / CVD | Electric Thermal Rods | Electricity / Water |
| Absorbent | Toxics / Emergency | Chemisorption (Dry) | None (Consumable Resin) |
| Gliding Heat | VOCs / Niche | Warm Plasma / Arc | Medium Power |
| Wet Type | Acids / Solubles | Water Solubility | Water / Neutralizer |
Explore Our Abatement Technologies
Plasma-Wet Type Abatement
The Ultimate Solution for High-GWP & PFC Gases
Technology Overview:
The Gemini Plasma-Wet system combines high-density plasma destruction with a wet scrubbing stage. It utilizes a thermal plasma torch to generate extreme temperatures (over 3,000°C), effectively cracking the molecular bonds of stable Perfluorocompounds (PFCs) that standard thermal oxidizers cannot destroy.
- Applications:
- Semiconductor Etch processes (CF4, SF6, NF3).
- FPD (Flat Panel Display) manufacturing.
- High-Global Warming Potential (GWP) gas streams.
- Benefits:
- High DRE: Destruction Removal Efficiency of >99.9% for PFCs.
Stable Operation: Handles rapid fluctuations in gas flow without flameout
Thermal-Wet Type Abatement
Flameless Electric Oxidation for CVD & Soluble
Technology Overview:
Our AquaTherm Thermal-Wet system replaces traditional fuel burners with high-performance electric thermal rods (heating elements). The exhaust gas passes through a specially designed cartridge heated by these rods to maintain a controlled oxidation temperature (typically 700°C - 900°C). Following decomposition, the gas enters a wet scrubbing stage to cool the stream and remove water-soluble byproducts.
- Applications:
- CVD (Chemical Vapor Deposition) exhaust.
- Process environments where LNG or Hydrogen fuel lines are unavailable or prohibited.
- Treatment of pyrophoric gases and flammable mixtures.
- Benefits:
- Facility Simplicity: 100% electrical operation eliminates the need for hazardous fuel supply piping (LNG/LPG).
- Stable Heating: Thermal rods provide consistent, uniform heat distribution without the risk of flame-out issues associated with burner-based systems.
- Low NOx: Flameless operation prevents the generation of thermal NOx byproducts often found in combustion systems.
Absorbent Type (Dry) Abatement
Passive Chemisorption for Toxic Gas Polishing
- Technology Overview: Absorbent type abatement, or dry scrubbing, uses canisters filled with specialized chemical resins. These resins react irreversibly with specific toxic gases at room temperature, converting them into harmless solids within the canister.
No water, fuel, or power is required for the reaction.
- Applications:
- Emergency Gas Scrubbers (EGS) for gas cabinet leaks.
- Ion Implantation exhaust.
- Low-flow toxic streams (Cl2, NH3, AsH3).
- Benefits:
- Very Low Utility Cost: Operates with water and very little amount electricity.
- Safety: Passive operation means it works even during a total facility power failure.
Gliding Heat Type Abatement
Next-Gen Energy Efficiency for VOCs & Niche Streams
- Technology Overview: The Solexis Gliding Heat system represents the evolution of plasma technology. Utilizing "Gliding Arc" or advanced warm plasma dynamics, this system creates highly reactive zones that treat gases with significantly lower energy input than traditional thermal oxidizers. It bridges the gap between thermal and non-thermal plasma.
- Applications:
- Volatile Organic Compounds (VOC) abatement.
- Processes requiring "Smart Power" usage to reduce carbon footprint.
- Medium-flow industrial exhaust.
- Benefits:
- Energy Savings: Drastically reduced power consumption compared to standard plasma.
- Selective Treatment: Highly effective at targeting specific molecular bonds without overheating the entire gas stream.
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Frequently Asked Questions (FAQ)
For Etch processes utilizing stable greenhouse gases like CF4 or SF6, the Plasma-Wet type is the industry standard. Only the high temperatures of plasma can effectively break these molecular bonds to meet environmental compliance.
Plasma-wet uses electrical arcs to reach extreme temperatures (>3,000°C) necessary for breaking down stable greenhouse gases. Thermal-wet typically uses electric heating rods to maintain a lower, stable oxidation temperature (~800°C), making it ideal for standard flammable gases and CVD processes without the need for extreme energy or fuel.
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